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Komora reakcyjna reaktora ALD

  • Tytuł patentu lub wzoru użytkowego: Komora reakcyjna reaktora ALD
  • Autorzy: M. Godlewski, K. Kopalko, R. Pietruszka, P. Sybilski, B. Witkowski
  • Urząd Patentowy i szczegóły prawa wyłączności: Urząd Patentowy Rzeczpospolitej Polskiej - wzór użytkowy 072488, data ogłoszenia 28.03.2022
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